Magnetron Sputtering Assemblies
Parts
Magnets
The magnets are essential parts of the magnetron sputtering assemblies. The arrangement of its magnetic circuits and the uniformity of its magnetic field directly affect the final sputtering outcome. Due to the heat generated by the discharge of the electron beam during operation, the magnets must also have adequate thermal resistance.
Machined Parts
Typical machined parts of the magnetron sputtering assemblies include the base, pole shoes, protective casings, connectors, and more. These are fabricated from materials such as low carbon steel, stainless steel, copper, aluminum, and nylon. Under water-cooled conditions, ferrous components require electroplating for protection.
Seal Rings
Seal rings play a crucial role in ensuring the integrity of the component chamber, preventing leaks of gas and water. We typically use imported, high-quality industrial seals that promise long-term, stable performance.
Fasteners
These fasteners include various screws, nuts, positioning pins, washers, retaining rings, etc. Depending on assembly requirements, some of these may undergo surface hardening treatments.
Assembly & Inspection
Following standard operating procedures, individual parts are assembled into a cohesive whole. After assembly, according to operational requirements, multiple tests are carried out, including visual inspection, surface magnetic field testing, helium leak testing, hydraulic pressure testing, and insulation checks.
Features
• High Efficiency: Leveraging cutting-edge magnetic material control technology, our magnetic assemblies enhance the uniformity of the working magnetic field. This not only streamlines the sputtering process, but also enhances coating preparation efficiency and target material utilization.
• Superior Quality: Our commitment to using premium materials and advanced manufacturing techniques ensures top-level product quality and performance.
• Reliability: Engineered for stability and reliability, our assemblies promise consistent, long-term performance, guaranteeing coating quality and preparation efficiency.
• Flexibility: We are well equipped to offer customized products, allowing for custom designs and manufacturing tailored to diverse coating preparation needs.
• Expertise: Our team of specialists boasts extensive experience and technical prowess, offering holistic technical support and service to our clients.
Our magnetron sputtering assemblies find applications in optoelectronics, semiconductors, surface treatments, and more. We cater to high-end coating preparation and research needs, solidifying our reputation as a trusted partner in the industry.
